The Impact of Bias and Nitrogen Pressure on TiNbN Coatings in Arc-PVD Processes—A Multifactorial Study
نویسندگان
چکیده
Titanium-based nitride physical vapour deposition (PVD) coatings, such as titanium (TiN), are state-of-the-art solutions for surface modifications of CoCrMo-based implants patients who hypersensitive to metallic ions cobalt, chromium and nickel. Variations the process parameters during cathodic arc evaporation known exhibit an impact on properties coatings. The aim this study was characterise effect substrate bias nitrogen pressure TiNbN coatings deposited CoCrMo alloys in a limited parameter set. Eighteen sets were coated with TiNbN. (−100 −200 V) (0.3–3.0 Pa) selected following randomised, multifactorial response test design. coating thickness, roughness, hardness scratch resistance measured standardised procedures. structure analysed by SEM XRD. exhibited significant thickness roughness. grain growth predominantly impacted bias. variation did not show any XRD, or results.
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ژورنال
عنوان ژورنال: Coatings
سال: 2022
ISSN: ['2079-6412']
DOI: https://doi.org/10.3390/coatings12070935